2-Oxo-2-[(5-oxo-4-oxatricyclo[4.2.1.0³,⁷]nonan-2-yl)oxy]ethyl Methacrylate 347886-81-1
Synonyms:MNLMA
Appearance:White to light yellow crystalline powder
Purity:99%min
Physical and Chemical Properties
Molecular formula: C₁₄H₁₆O₆
Molecular weight: 280.28 g/mol
Melting point: 74.0 – 78.0 °C
Density: 1.3 ± 0.1 g/cm³
Boiling point: 444.8 ± 30.0 °C (760 mmHg)
Solubility: Soluble in polar aprotic solvents (DMF, NMP); insoluble in water
Stability: Polymerizable under heat/light/initiators; store inhibited, cool & sealed
Uses
High-performance monomer for 193nm ArF photoresist polymers in semiconductor lithography
Improves polymer’s etching resistance, thermal stability, and resolution performance
Used in advanced photoresist formulations for high-precision microchip manufacturing
Key raw material for functional acrylic resins requiring high thermal & chemical resistance
HS Code: 2916149090
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