Synonym:α-Methacryloxy-γ-butyrolactone, GBLMA
Molecular Formula:C₈H₁₀O₄
Molecular Weight:170.16 g/mol
HS Code:2915900090
Appearance:colorless transparent liquid
Purity:99%min
Key functional monomer for ArF photoresists in semiconductor lithography
Improves etching resistance, adhesion and thermal stability of polymers
Used in UV-curable coatings, adhesives and high-performance resins for microelectronics
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